MAGNETIC CONTROL AF COATING MACHINE

YCAF1916A

The total power：148KW
Size：W4500×D6000×H3250mm
Weight：9(t)
The equipment is specially used for vacuum coating processing of structural parts of IT manufacturing. Each system unit and overall composition meets the requirements of optical and functional film production process. It is suitable for AR film, NCVM color film, metal decorative film, metal functional film, AF functional film and so on.

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The equipment is specially used for vacuum coating processing of structural parts of IT manufacturing. Each system unit and overall composition meets the requirements of optical and functional film production process. It is suitable for AR film, NCVM color film, metal decorative film, metal functional film, AF functional film and so on.
The coating machine adopts a vertical box body, an observation window is arranged on the front chamber door, a rotating frame drive is installed in the box, a baking system is installed in the furnace, and a rear vacuum flange is connected to the high vacuum pump.

1) The frontstage vacuum：consists of a rotary vane pump and a Rootspump.

2) High vacuum: diffusion pump, u ltra-low temperature condensate trap (Polycold), vacuum chamber and diffusion pump trap.

3) Pumping system：Start，rough pumping，standby and maintenance processes are completed by the pumps，pipes and valves of all levels under the control of the system.

ITEM	SPEC
Film forming system	1) IF power supply, rotating cathode twin cylindrical target1，and reserve a pair of target positions (power supply can be converted to drive two sets oftargets respectively). 2）8 boat impedance evaporation source2. 3) Ion bombardment rod*4.
Working mode	Ion cleaning, heating and evaporation, quartz crystal film thickness controller monitors the film thickness and automatically stops.
Process flow	Clamping - Vacuuming - Ion cleaning - Electron gun evaporation - Impedance evaporation AF - Intake and release.
Power	The total power is 148KW and the average power is 48KW.
Outer size and total weight of the equipment	1）Main frame and control cabinet, do not open the doorW4500×D6000×H3250, open the door W4500×D7300xH3250. 2) The rough pumping group and the rough pumping pipe occupying land: 2000×1500. 3) The necessary operation and maintenance space outside the main frame: 800mm in the horizontal direction and 400mm in the vertical direction. 4）Total weight: 9 tons